Epitaxial growth of NbN thin films for electrodes using atomic layer deposition
Authors:
- 17 June 2023
- journal article
- research article
- Published by Elsevier in Applied Surface Science
- Vol. 636
Abstract
No abstract availableKeywords
Funding Information
- National Research Foundation of Korea
- Ministry of Trade, Industry and Energy (RS-2023-00234833, RS-2023-00237002)
- Ministry of Science, ICT and Future Planning (RS-2023-00258557)
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