Design and Characterization of an Aluminum Nitride-Based MEMS Hydrophone With Biologically Honeycomb Architecture

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Abstract
In this article, we present a high-performance aluminum nitride (AlN)-based microelectromechanical system (MEMS) hydrophone sensor, in which the sensing cells are designed and arranged as an innovative honeycomb architecture for achieving large acoustic pressure sensitivity and high fill-factor. An 8×9 array of 360 μm in characteristic size, 0.92-MHz MEMS hydrophone sensor is developed based on an AlN-on-cavity silicon-on-insulator (CSOI) platform. The size of the MEMS hydrophone sensor is 3.2 mm ×3.2 mm. The MEMS hydrophone sensor and its preamplification circuit are integrated on a printed circuit board and packaged together with an acoustically transparent material, in order to meet the stringent requirements of underwater applications. The packaged MEMS hydrophone is fully characterized through using an industry-standard hydrophone calibration instrument. The MEMS hydrophone achieves an acoustic pressure sensitivity of -178 dB (re: 1 V/ μ Pa), with a maximum nonlinearity of 0.1%, and a noise resolution of 58.7 dB (re: 1 μPa/Hz). The measurement results show that the reported MEMS hydrophone sensor with bioinspired honeycomb structure is compared favorable with advanced commercially available bulky hydrophones.
Funding Information
  • National Key Research and Development Project of China (2020YFB2008804)
  • Fundamental Research Funds for the Central Universities (2042021kf0191)

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