A qualitative analysis of designs of micromachined electromagnetic inductive contactless suspension

This publication has 16 references indexed in Scilit:

• Proposal for Micromachined Accelerometer, Based on a Contactless Suspension With Zero Spring Constant
  IEEE Sensors Journal, 2012
• Proposal for a Micromachined Dynamically Tuned Gyroscope, Based on a Contactless Suspension
  IEEE Sensors Journal, 2011
• Characterization of the 2nd generation magnetic microbearing with integrated stabilization for frictionless devices
  2011
• A fully MEMS-compatible process for 3D high aspect ratio micro coils obtained with an automatic wire bonder
  Journal of Micromechanics and Microengineering, 2009
• The study of an electromagnetic levitating micromotor for application in a rotating gyroscope
  Sensors and Actuators A: Physical, 2006
• Micromotor with electromagnetically levitated rotor using separated coils
  Electronics Letters, 2004
• Development of a levitated micromotor for application as a gyroscope
  Sensors and Actuators A: Physical, 2000
• Modelling and testing of a frictionless levitated micromotor
  Sensors and Actuators A: Physical, 1997
• Initial fabrication of a micro-induction gyroscope
  Microelectronic Engineering, 1996
• Levitation of a micromachined rotor forapplication in a rotating gyroscope
  Electronics Letters, 1995