Silicon photonics efficient fiber coupler based on a metastructure with a minimum feature size of 150 nm

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Abstract
We propose a silicon photonics fiber coupler consisting of a metastructure containing a through-hole array and a partially etched grating to obtain high efficiency. Using an evolution optimization algorithm, we optimized 121 structural parameters and achieved a minimum feature size of 150 nm, which greatly simplifies the fabrication using wafer-scale foundry services. We designed two structures, one achieving an 86% coupling efficiency into a single fiber, and the other exhibiting a full flat spectrum in the C band. The high-efficiency structure was fabricated using a 300-mm wafer process, and an efficiency of 78% was experimentally evaluated.
Funding Information
  • New Energy and Industrial Technology Development Organization (JPNP14004)
  • Japan Society for the Promotion of Science (22H00299)
  • Tateisi Science and Technology Foundation (Research Grant S)

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