Ultralow dielectric cross-linked silica aerogel nanocomposite films for interconnect technology
Authors:
- Haryeong ChoiHCHaryeong Choi
- Taehee KimTKTaehee Kim
- Taeho KimTKTaeho Kim
- Sunil MoonSMSunil Moon
- SangHyuk YooSYSangHyuk Yoo
- Vinayak G. ParaleVinayak G. Parale
- Rushikesh P. DhavaleRushikesh P. Dhavale
- Keonwook KangKKKeonwook Kang
- Hyunchul SohnHSHyunchul Sohn
- Hyung-Ho ParkHyung-Ho Park
- 2 June 2022
- journal article
- research article
- Published by Elsevier in Applied Materials Today
- Vol. 28
Abstract
No abstract availableKeywords
Funding Information
- Samsung (SRFC-TA1703-04)
- Ministry of Science, ICT and Future Planning (2020R1A5A1019131)
- National Research Foundation of Korea
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