Control of crystal orientation of Ti thin films by sputtering
Authors:
- Y HoshiYHY Hoshi
- E SuzukiESE Suzuki
- H ShimizuHSH Shimizu
- 1 June 1999
- journal article
- Published by Elsevier in Electrochimica Acta
- Vol. 44 (21-22) , 3945-3952
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
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