Reducing vertex radius of curvature for 100 nm size square and triangular holes in GaN by shape modification
- 1 June 2025
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 64 (6) , 066504
Abstract
We fabricated arrays of circular, square, and triangular air holes in GaN by the conventional method using the electron beam lithography and reactive ion etching. The vertex radius of curvature for the square and triangular holes was reduced by shape modification. The minimum vertex radius of curvature for the 100 nm size square and triangular holes were 17 and 11 nm, respectively.Keywords
Funding Information
- Japan Society for the Promotion of Science
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