Evaporation Source for Deposition of Protective Layers inside Tubes

Authors:
  • GMGeavit Musa
    Geavit Musa
  • IMIon Mustata
    Ion Mustata
  • GDGheorghe Dinescu
    Gheorghe Dinescu
  • GBGeorge Bajeu
    George Bajeu
  • ERElena Raiciu
    Elena Raiciu
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Abstract
A heated cathode arc can be ignited in vacuum in the vapours of the anode material due to the accelerated electron beam from the cathode. A small assembly, consisting of an electron gun as the cathode and a refractory metal crucible, containing the material to be evaporated, as the anode, can be moved along the axis of the tube whose inside wall is to be covered with a protective layer. The vacuum arc ignited between the electrodes in the vapours of the evaporating anode material ensures a high deposition rate with low thermal energy transport to the tube wall. This new method can be used for the deposition of various metal layers inside different kinds of tubes (metallic, glass, ceramics or plastics).

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