Black-silicon production process by CF4/H2 plasma
Authors:
- E. VassalloEVE. Vassallo
- M. PedroniMPM. Pedroni
- S.M. PietralungaSPS.M. Pietralunga
- R. CanielloRCR. Caniello
- A. CremonaACA. Cremona
- F. Di FonzoFFF. Di Fonzo
- F. GhezziFGF. Ghezzi
- F. InzoliFIF. Inzoli
- G. MonteleoneGMG. Monteleone
- G. NavaGNG. Nava
- V. SpampinatoVSV. Spampinato
- A. TagliaferriATA. Tagliaferri
- 1 March 2016
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 603, 173-179
Abstract
No abstract availableKeywords
Funding Information
- CNR-Regione Lombardia (18088/RCC)
- CNR-Regione Lombardia framework (3728 - 11/07/2012)
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