Applications of a semiconductor backscattered electron detector in a scanning electron microscope
Authors:
- J StephenJSJ Stephen
- B J SmithBSB J Smith
- D C MarshallDMD C Marshall
- E M WittamEWE M Wittam
- 1 July 1975
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 8 (7) , 607-610
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The construction and uses of an efficient backscattered electron detector for scanning electron microscopyJournal of Physics E: Scientific Instruments, 1974
- A silicon detector for the Stereoscan scanning electron microscopeJournal of Physics E: Scientific Instruments, 1973
- Kikuchi-like reflection patterns obtained with the scanning electron microscopePhilosophical Magazine, 1967