A Ladder Transmission Line Model for the Extraction of Ultralow Specific Contact Resistivity—Part I: Theoretical Design and Simulation Study

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Abstract
A ladder transmission line model (LTLM) that features capability to eliminate parasitic metal resistance from contact metal and access electrodes, a simple fabrication process, and a sub-10⁻¹⁰ Ω· cm² resolution is demonstrated for accurate extraction of the specific contact resistivity ρc. The proposed LTLM is verified by technology computer-aided design (TCAD) simulation and a two-layer distributed-resistor network model. After eliminating the parasitic metal resistance, the current spreading and crowding effects are the main factors that contribute to the extraction error in LTLM. The effects of current spreading and crowding on the extraction of ρc in LTLM are further quantitatively analyzed and design guidelines to achieve a sub-10⁻¹⁰ Ω · cm² resolution of ρc extraction are provided. The details of theoretical modeling and simulation of LTLM are documented in Part I. The experimental demonstration of extracting sub-10⁻⁹ Ω · cm² ρc using the proposed LTLM is provided in Part II.
Funding Information
  • SingaporeMinistry of Education (MOE) Tier 2 Fund (R-263-000-D45-112)
  • MOE Tier 1 Fund (R-263-000-C58-133)
  • National Research Foundation (NRF), Singapore, under its Quantum Engineering Program (QEP-P3)

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