Impact of C-axis Orientation of Aluminium Nitride Thin Films on the Long-term Stability and Mechanical Properties of Resonantly Excited MEMS Cantilevers
Authors:
- M. SchneiderMSM. Schneider
- A. BittnerABA. Bittner
- P. SchmidPSP. Schmid
- U. SchmidUSU. Schmid
Open Access
- 1 January 2014
- journal article
- Published by Elsevier in Procedia Engineering
- Vol. 87, 1493-1496
Abstract
No abstract availableKeywords
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