Ulrich Schmid
Current Organizations / Institutes
The organizations/institutes from the scholar's latest article
Previous Organizations / Institutes
The organizations / institutes from the scholar's other articles in the past ten years
Ulrich Schmid has a total of 25 co-authors. Here are the top co-authors by number of shared publications:
- Helmut Seidel
Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, 66123 Saarbrücken, Germany
6 shared publications - Achim Bittner
Hahn-Schickard-Gesellschaft für angewandte Forschung, Germany
3 shared publications K. Bauer
Corporate Research Center
2 shared publicationsR. Wagner
Corporate Research Center
2 shared publicationsA Friedberger
Department of Sensors, Electronics & Systems Integration, EADS Innovation Works, EADS Deutschland GmbH, D-81663 Munich, Germany
1 shared publicationA. Ababneh
Saarland University
1 shared publication
Latest Publications
- Open Access
- 1 January 2014
- Published by Elsevier in Procedia Engineering
- Vol. 87, 1493-1496
Impact of C-axis Orientation of Aluminium Nitride Thin Films on the Long-term Stability and Mechanical Properties of Resonantly Excited MEMS Cantilevers
- 1 January 2014
- Published by Elsevier in Procedia Engineering
- Vol. 87, 1493-1496
Open AccessImpact of C-axis Orientation of Aluminium Nitride Thin Films on the Long-term Stability and Mechanical Properties of Resonantly Excited MEMS Cantilevers
- Open Access
- 1 January 2014
- Published by Elsevier in Procedia Engineering
- Vol. 87, 116-119
Impact of Patterning Technique on the Long Term Stability of Ag Thin Films
- 1 January 2014
- Published by Elsevier in Procedia Engineering
- Vol. 87, 116-119
Open AccessImpact of Patterning Technique on the Long Term Stability of Ag Thin Films
- 13 December 2013
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 25 (1) , 015007
High temperature measurement set-up for the electro-mechanical characterization of robust thin film systems
- 13 December 2013
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 25 (1) , 015007
High temperature measurement set-up for the electro-mechanical characterization of robust thin film systems
- 30 May 2008
- Published by Springer Nature in Microsystem Technologies
- Vol. 14 (8) , 1193-1203
Evaluation of electron beam welding technique for the integration of robust sensor elements into high-pressure automotive systems
- 30 May 2008
- Published by Springer Nature in Microsystem Technologies
- Vol. 14 (8) , 1193-1203
Evaluation of electron beam welding technique for the integration of robust sensor elements into high-pressure automotive systems
- 12 February 2008
- Published by Springer Nature in Microsystem Technologies
- Vol. 14 (4-5) , 439
Special Issue of the Conference Smart Sensors, Actuators and MEMS, Maspalomas, Gran Canaria, Spain, 2–4 May 2007
- 12 February 2008
- Published by Springer Nature in Microsystem Technologies
- Vol. 14 (4-5) , 439
Special Issue of the Conference Smart Sensors, Actuators and MEMS, Maspalomas, Gran Canaria, Spain, 2–4 May 2007
- 1 January 2008
- Published by Elsevier in Applied Surface Science
- Vol. 254 (7) , 2150-2157
Investigation of the interaction between electrical discharges and low resistivity silicon substrates
- 1 January 2008
- Published by Elsevier in Applied Surface Science
- Vol. 254 (7) , 2150-2157
Investigation of the interaction between electrical discharges and low resistivity silicon substrates
- 17 October 2007
- Published by Springer Nature in Microsystem Technologies
- Vol. 14 (4-5) , 483-490
Characterization of aluminium nitride and aluminium oxide thin films sputter-deposited on organic substrates
- 17 October 2007
- Published by Springer Nature in Microsystem Technologies
- Vol. 14 (4-5) , 483-490
Characterization of aluminium nitride and aluminium oxide thin films sputter-deposited on organic substrates
- 18 May 2007
- Published by SPIE-Intl Soc Optical Eng
- Vol. 6589, 65890H
Investigations on the passivation of thin film flow sensors on flexible substrates
To ensure an enhanced life-time of micromachined devices, passivation layers are commonly applied to protect functionalized components against environmental stress. For flow sensitive elements on a flexible polyimide foil the use of reactively sputter-deposited aluminium oxide is investigated. Due to a high defect density located at the interface between the passivation layer and the organic substrate, the adhesion of the pure aluminium oxide thin films on the organic substrate was found to be poor when applying a combination of mechanical and thermal treatment as an accelerated ageing procedure. A bi-layer consisting of aluminium nitride and aluminium oxide is proposed to enhance the low adhesion capability being strongly disadvantageous for any technical application.
- 18 May 2007
- Published by SPIE-Intl Soc Optical Eng
- Vol. 6589, 65890H
Investigations on the passivation of thin film flow sensors on flexible substrates
To ensure an enhanced life-time of micromachined devices, passivation layers are commonly applied to protect functionalized components against environmental stress. For flow sensitive elements on a flexible polyimide foil the use of reactively sputter-deposited aluminium oxide is investigated. Due to a high defect density located at the interface between the passivation layer and the organic substrate, the adhesion of the pure aluminium oxide thin films on the organic substrate was found to be poor when applying a combination of mechanical and thermal treatment as an accelerated ageing procedure. A bi-layer consisting of aluminium nitride and aluminium oxide is proposed to enhance the low adhesion capability being strongly disadvantageous for any technical application.
- 1 January 2007
- Published by Springer Nature in MRS Proceedings
- Vol. 1059
Macroscopic 2D Design of Micro/Nano Grain Architectures by Laser Interference Metallurgy
- 1 January 2007
- Published by Springer Nature in MRS Proceedings
- Vol. 1059
Macroscopic 2D Design of Micro/Nano Grain Architectures by Laser Interference Metallurgy