Air Vortices and Nano-Vibration of Aerostatic Bearings

This publication has 10 references indexed in Scilit:

• CFD investigation of pressure depressions in aerostatic circular thrust bearings
  Tribology International, 2009
• Numerical and experimental analysis of transient state micro-bounce of aerostatic guideways caused by small pores
  CIRP Annals, 2009
• A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining
  CIRP Annals, 2007
• The effect of the recess shape on performance analysis of the gas-lubricated bearing in optical lithography
  Tribology International, 2006
• Numerical and Experimental Analysis for the Small Vibration of Aerostatic Guideways
  CIRP Annals, 2006
• Simulation of gas flow in microchannels with a sudden expansion or contraction
  Journal of Fluid Mechanics, 2005
• Improvement of Machining Accuracy of 5-Axis Control Ultraprecision Machining by Means of Laminarization and Mirror Surface Finishing
  CIRP Annals, 2005
• X-Y-θ Nano-Positioning Table System for a Mother Machine
  CIRP Annals, 2004
• Effects of operating conditions and supply hole diameter on the performance of a rectangular aerostatic bearing
  Tribology International, 1997
• Empirical correlations for the pressure depression in externally pressurized gas bearings
  Tribology International, 1997