Design and simulation of a novel electro-thermally actuated lateral RF MEMS latching switch for low power applications
- 29 January 2014
- journal article
- research article
- Published by Springer Nature in Microsystem Technologies
- Vol. 21 (2) , 465-475
Abstract
No abstract availableKeywords
This publication has 31 references indexed in Scilit:
- A lateral RF MEMS capacitive switch utilizing parylene as dielectricMicrosystem Technologies, 2011
- Static analysis for functionally graded piezoelectric actuators or sensors under a combined electro-thermal loadEuropean Journal of Mechanics - A/Solids, 2009
- Surface micromachined high-performance RF MEMS inductorsMicrosystem Technologies, 2006
- A fully wafer-level packaged RF MEMS switch with low actuation voltage using a piezoelectric actuatorJournal of Micromechanics and Microengineering, 2006
- Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switchesJournal of Micromechanics and Microengineering, 2005
- Variable optical attenuator using a thermal actuator array with dual shuttersOptics Communications, 2004
- Modeling of two-hot-arm horizontal thermal actuatorJournal of Micromechanics and Microengineering, 2003
- RF MEMS switches and switch circuitsIEEE Microwave Magazine, 2001
- Analysis and design of polysilicon thermal flexure actuatorJournal of Micromechanics and Microengineering, 1999
- Performance of low-loss RF MEMS capacitive switchesIEEE Microwave and Guided Wave Letters, 1998