Detonation Technology in Producing Metal–Ceramic Powder Targets for Magnetron Sputtering
- 1 June 2023
- journal article
- research article
- Published by Allerton Press in Russian Engineering Research
- Vol. 43 (6) , 735-738
Abstract
An innovative approach is proposed to the production of plane and cylindrical composite metal–ceramic targets (cathodes) for magnetron sputtering: thKeywords
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