Oxygen microwave plasma treatment of silicone elastomer: Kinetic behavior and surface composition

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Abstract
Silicone elastomers were surface modified by oxygen microwave plasma under different conditions and the elemental composition was followed by X‐ray photoelectron spectroscopy (XPS). The changes in elemental composition were mapped by a method based on ternary XPS diagrams that we have recently developed. Already at the shortest treatment times, 5 s, the change in surface composition is more than one‐half the maximum change obtained on prolonged exposure. After this initial change, the surface gradually oxidizes toward the final composition. Curve resolutions of C1s and Si2p XPS data showed that the initial jump in surface composition is caused by an oxidation of silicon where one of the two methyl groups are replaced by an oxygen. The second methyl group appears to be more difficult to remove, but as the treatment progresses, the number of oxygen bonded to silicon gradually increases. The dominating form of carbon acts as unoxidized methyl groups throughout the process, but the total carbon percentage decreases as the treatment progresses. This indicates either that the methyl groups are removed without prior oxidation or that the methyl groups are removed shortly after oxidation. A silica‐like surface layer was formed on prolonged plasma treatment under all the investigated conditions. © 2004 Wiley Periodicals, Inc. J Appl Polym Sci 91: 4098–4104, 2004

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