Fabrication by electron beam induced deposition and transmission electron microscopic characterization of sub-10-nm freestanding Pt nanowires
Authors:
- 22 May 2006
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 88 (21) , 213116
Abstract
We present a method to reduce the size and improve the crystal quality of freestanding nanowires grown by electron beam induced deposition from a platinum metal organic precursor in a dual beam system. By freestanding horizontal growth and subsequent electron irradiation in a transmission electron microscope, sub- polycrystalline platinum nanowires have been obtained. A combined transmission electron microscopy–electron energy loss analysis has shown that the amorphous carbon, mixed to nanocrystalline platinum in the as-deposited material, is removed from the wires during irradiation. The same treatment progressively transforms nanocrystals dispersed in the amorphous matrix in a continuous polycrystalline platinum wire.
Keywords
This publication has 25 references indexed in Scilit:
- Logarithmic behavior of the conductivity of electron-beam deposited granularnanowiresPhysical Review B, 2005
- Cross Section Investigations of Compositions and Sub‐Structures of Tips Obtained by Focused Electron Beam Induced DepositionAdvanced Engineering Materials, 2005
- Fabrication of Large Number Density Platinum Nanowire Arrays by Size Reduction Lithography and Nanoimprint LithographyNano Letters, 2005
- Influence of the beam scan direction during focused electron beam induced deposition of 3D nanostructuresMicroelectronic Engineering, 2005
- Suspended single-electron transistors: Fabrication and measurementApplied Physics Letters, 2005
- Approaching the Quantum Limit of a Nanomechanical ResonatorScience, 2004
- Direct fabrication of nanowires in an electron microscopeApplied Physics Letters, 2003
- The role of secondary electrons in electron-beam-induced-deposition spatial resolutionMicroelectronic Engineering, 2002
- Density,fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopyPhysical Review B, 2000
- Electron diffraction analysis of polycrystalline and amorphous thin filmsActa Crystallographica Section A Foundations of Crystallography, 1988