Nanoimprint stamps with ultra-high resolution: Optimal fabrication techniques
Open Access
- 1 April 2018
- journal article
- research article
- Published by Elsevier in Microelectronic Engineering
- Vol. 190, 73-78
Abstract
No abstract availableKeywords
Funding Information
- NFFA-Europe (654360)
- Swedish Foundation for Strategic Research (RIF14-0090)
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