Relaxation oscillations of low-frequency Ar/SF6inductive plasma discharges
Authors:
- 3 June 2003
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 12 (3) , 396-402
Abstract
A new class of relaxation oscillations has been observed in some inductive plasma discharges operated with low-pressure argon and SF6 gas mixtures. Some plasma instability seems to develop periodically in the downstream plasma. The nonlinear evolution and the two-dimensional spatial structure of the instabilities are detailed with Langmuir probe arrays and fast video imaging. The measurements show that the instabilities grow in a quasi-spherical downstream layer. The upstream plasma is slightly compressed, while large rarefactions are observed downstream. The upstream plasma then moves slowly downward until the initial plasma profiles are recovered. This article features multimedia enhancementsKeywords
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