High-sensitive dual-mode thermoreflectance microscopy for the stationary and transient thermal analysis of microelectronic devices

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Abstract
This study presents a straightforward, efficient dual-mode thermoreflectance microscopy (TRM) system for analyzing the stationary and dynamic thermal properties of microelectronic devices. The proposed TRM system employs a standard visible microscope and implements two distinct imaging process schemes to obtain thermal images at different time scales. For TRM imaging of an ohmic microdevice, the optimal probing wavelength is predetermined from the thermoreflectance spectrum, acquired using a white light-emitting diode source and tunable bandpass filters to enhance thermal sensitivity. Thermoreflectance images are obtained in both stationary and transient modes using a four-bucket method and a pulsed boxcar averaging method, respectively. This thermography approach demonstrates highly sensitive, time-integrated stationary thermal imaging and time-gated transient thermal imaging with a temporal resolution of 200 ns. The system shows significant potential as an analytical tool with a sub-micron spatiotemporal resolution for evaluating heat generation and self-heating behavior in microelectronic devices.
Funding Information
  • National Research Foundation of Korea (2021M3H4A6A03103722)
  • National Research Council of Science and Technology (GTL24041-000)
  • Korea Basic Science Institute (B437600)

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