Plasma-enhanced deposition of hard silicon nitride-like coatings from hexamethyldisiloxane and ammonia
Authors:
- Z.G. XiaoZXZ.G. Xiao
- T.D. ManteiTMT.D. Mantei
- 1 July 2003
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 172 (2-3) , 184-188
Abstract
No abstract availableThis publication has 33 references indexed in Scilit:
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