Rankings
Publications
Search Publications
Cited-by Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Scilit
About Us
Advisory Board
Data Sources
Career
Support / Contact
User Guide
Publisher User
Search Function
Rankings Function
API Resource
Scilit Knowledge
Metrics
Scilit Recognitions
Publications Classification
Media
News
Blog
Login
Register
Home
Publications
Plasma-enhanced deposition of hard silicon nitride-like coatings from hexamethyldisiloxane and ammonia
Publication with shared reference
10.1016/s0257-8972(03)00341-4
Home
Publications
Plasma-enhanced deposition of hard silicon nitride-like coatings from hexamethyldisiloxane and ammonia
Publication with shared reference
10.1016/s0257-8972(03)00341-4
Publications with shared reference:
Plasma-enhanced deposition of hard silicon nitride-like coatings from hexamethyldisiloxane and ammonia
0
publications found
Export
Export
Analytics view
Analytics view
Scroll to top