Influence analysis of surface particulate and molecular contamination in CMP process of mandrel for EP focusing mirror
- 7 May 2025
- journal article
- research article
- Published by Springer Nature in Radiation Detection Technology and Methods
- Vol. 9 (2) , 344-354
Abstract
No abstract availableKeywords
Funding Information
- the Strategic Priority Program on Space Science China (XDA15020106, XDA15020501)
- The National Natural Science Foundation of China (42327802)
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