A study on dielectric properties of a new polyimide film suitable for interlayer dielectric material in microelectronics applications
Authors:
- A KuntmanAKA Kuntman
- H KuntmanHKH Kuntman
- 1 August 2000
- journal article
- Published by Elsevier in Microelectronics Journal
- Vol. 31 (8) , 629-634
Abstract
No abstract availableKeywords
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