Micromachined subminiature condenser microphones in silicon
Authors:
- 1 April 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 32 (1-3) , 560-564
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Silicon condenser microphone with integrated field-effect transistorSensors and Actuators A: Physical, 1991
- Acoustic sensorsSensors and Actuators A: Physical, 1991
- A silicon electrostatic ultrasonic transducerIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1989
- Subminiature silicon integrated electret capacitor microphoneIEEE Transactions on Electrical Insulation, 1989
- A subminiature condenser microphone with silicon nitride membrane and silicon back plateThe Journal of the Acoustical Society of America, 1989