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  3. Ultra-thin Ta/sub 2/O/sub 5/SiO/sub 2/ gate insulator with TiN gate technology for 0.1/spl mu/m MOSFETs
  4. Publication with shared reference
  5. 10.1109/vlsit.1997.623735
  1. Home
  2. Publications
  3. Ultra-thin Ta/sub 2/O/sub 5/SiO/sub 2/ gate insulator with TiN gate technology for 0.1/spl mu/m MOSFETs
  4. Publication with shared reference
  5. 10.1109/vlsit.1997.623735

Publications with shared reference:

Ultra-thin Ta/sub 2/O/sub 5/SiO/sub 2/ gate insulator with TiN gate technology for 0.1/spl mu/m MOSFETs

0 publications found

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