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Step Coverage and Electrical Properties of (Ba, Sr)TiO3 Films Prepared by Liquid Source Chemical Vapor Deposition Using TiO(DPM)2
Publication with shared reference
10.1143/jjap.33.5129
Home
Publications
Step Coverage and Electrical Properties of (Ba, Sr)TiO3 Films Prepared by Liquid Source Chemical Vapor Deposition Using TiO(DPM)2
Publication with shared reference
10.1143/jjap.33.5129
Publications with shared reference:
Step Coverage and Electrical Properties of (Ba, Sr)TiO
3
Films Prepared by Liquid Source Chemical Vapor Deposition Using TiO(DPM)
2
0
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