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Demonstration of β-Ga 2 O 3 MEMS resonators fabricated by crystallographic gas etching of (001) β-Ga 2 O 3 substrates
Publication with shared reference
10.35848/1882-0786/aebde4
Home
Publications
Demonstration of β-Ga 2 O 3 MEMS resonators fabricated by crystallographic gas etching of (001) β-Ga 2 O 3 substrates
Publication with shared reference
10.35848/1882-0786/aebde4
Publications with shared reference:
Demonstration of β-Ga
2
O
3
MEMS resonators fabricated by crystallographic gas etching of (001) β-Ga
2
O
3
substrates
0
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