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  3. Effects of Thickness Effect and Rapid Thermal Annealing on pH Sensing Characteristics of Thin HfO2 Films Formed by Atomic Layer Deposition
  4. Publication with shared reference
  5. 10.1143/jjap.50.10pg03
  1. Home
  2. Publications
  3. Effects of Thickness Effect and Rapid Thermal Annealing on pH Sensing Characteristics of Thin HfO2 Films Formed by Atomic Layer Deposition
  4. Publication with shared reference
  5. 10.1143/jjap.50.10pg03

Publications with shared reference:

Effects of Thickness Effect and Rapid Thermal Annealing on pH Sensing Characteristics of Thin HfO2 Films Formed by Atomic Layer Deposition

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