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A review of nitrogen trifluoride for dry etching in microelectronics processing
Publication with shared reference
10.1016/s0026-2692(85)80121-x
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Publications
A review of nitrogen trifluoride for dry etching in microelectronics processing
Publication with shared reference
10.1016/s0026-2692(85)80121-x
Publications with shared reference:
A review of nitrogen trifluoride for dry etching in microelectronics processing
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