A review of nitrogen trifluoride for dry etching in microelectronics processing
Authors:
- Bogdan GoljaBGBogdan Golja
- John A. BarkanicJBJohn A. Barkanic
- Andrew HoffAHAndrew Hoff
- 28 February 1985
- journal article
- review article
- Published by Elsevier in Microelectronics Journal
- Vol. 16 (1) , 5-21
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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