You Zhao

With the development of energetic materials (EMs) and microelectromechanical systems (MEMS) initiating explosive devices, the measurement of detonation pressure generated by EMs in the microscale has become a pressing need. This paper develops a manganin thin film ultra-high pressure sensor based on MEMS technology for measuring the output pressure from micro-detonator. A reliable coefficient is proposed for designing the sensor’s sensitive element better. The sensor employs sandwich structure: the substrate uses a 0.5 mm thick alumina ceramic, the manganin sensitive element with a size of 0.2 mm × 0.1 mm × 2 μm and copper electrodes of 2 μm thick are sputtered sequentially on the substrate, and a 25 μm thick insulating layer of polyimide is wrapped on the sensitive element. The static test shows that the piezoresistive coefficient of manganin thin film is 0.0125 GPa⁻¹. The dynamic experiment indicates that the detonation pressure of micro-detonator is 12.66 GPa, and the response time of the sensor is 37 ns. In a word, the sensor developed in this study is suitable for measuring ultra-high pressure in microscale and has a shorter response time than that of foil-like manganin gauges. Simultaneously, this study could be beneficial to research on ultra-high-pressure sensors with smaller size.

In high speed and high precision machining applications, it is important to monitor the machining process in order to ensure high product quality. For this purpose, it is essential to develop a dynamometer with high sensitivity and high natural frequency which is suited to these conditions. This paper describes the design, calibration and performance of a milling torque sensor based on piezoresistive MEMS strain. A detailed design study is carried out to optimize the two mutually-contradictory indicators sensitivity and natural frequency. The developed torque sensor principally consists of a thin-walled cylinder, and a piezoresistive MEMS strain gauge bonded on the surface of the sensing element where the shear strain is maximum. The strain gauge includes eight piezoresistances and four are connected in a full Wheatstone circuit bridge, which is used to measure the applied torque force during machining procedures. Experimental static calibration results show that the sensitivity of torque sensor has been improved to 0.13 mv/Nm. A modal impact test indicates that the natural frequency of torque sensor reaches 1216 Hz, which is suitable for high speed machining processes. The dynamic test results indicate that the developed torque sensor is stable and practical for monitoring the milling process.

This paper presents a three-component fixed dynamometer based on a strain gauge, which reduces output errors produced by the cutting force imposed on different milling positions of the workpiece. A reformative structure of tri-layer cross beams is proposed, sensitive areas were selected, and corresponding measuring circuits were arranged to decrease the inaccuracy brought about by positional variation. To simulate the situation with a milling cutter moving on the workpiece and validate the function of reducing the output errors when the milling position changes, both static calibration and dynamic milling tests were implemented on different parts of the workpiece. Static experiment results indicate that with standard loads imposed, the maximal deviation between the measured forces and the standard inputs is 4.87%. The results of the dynamic milling test illustrate that with identical machining parameters, the differences in output variation between the developed sensor and standard dynamometer are no larger than 6.61%. Both static and dynamic experimental results demonstrate that the developed dynamometer is suitable for measuring milling force imposed on different positions of the workpiece, which shows potential applicability in machining a monitoring system.

This paper presents a high performance triaxial cutting force sensor with excellent accuracy, favorable natural frequency and acceptable cross-interference for high speed turning process. Octagonal ring is selected as sensitive element of the designed sensor, which is drawn inspiration from ring theory. A novel structure of two mutual-perpendicular octagonal rings is proposed and three Wheatstone full bridge circuits are specially organized in order to obtain triaxial cutting force components and restrain cross-interference. Firstly, the newly developed sensor is tested in static calibration; test results indicate that the sensor possesses outstanding accuracy in the range of 0.38%–0.83%. Secondly, impacting modal tests are conducted to identify the natural frequencies of the sensor in triaxial directions (i.e., 1147 Hz, 1122 Hz and 2035 Hz), which implies that the devised sensor can be used for cutting force measurement in a high speed lathe when the spindle speed does not exceed 17,205 rev/min in continuous cutting condition. Finally, an application of the sensor in turning process is operated to show its performance for real-time cutting force measurement; the measured cutting forces demonstrate a good accordance with the variation of cutting parameters. Thus, the developed sensor possesses perfect properties and it gains great potential for real-time cutting force measurement in turning.