Junichi Uchikoshi
Current Organizations / Institutes
The organizations/institutes from the scholar's latest article
Research Subjects
Junichi Uchikoshi has a total of 5 co-authors. Here are the top co-authors by number of shared publications:
- Kenta Arima
Department of Precision Engineering, Graduate School of Engineering, The University of Osaka, 2-1, Yamada-oka, Suita, Osaka 565-0871, Japan
1 shared publication - Kentaro Kawai
Graduate School of Engineering Osaka University 2-1, Yamada-oka, Suita Osaka 565-0871 Japan
1 shared publication - Mizuho Morita
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
1 shared publication - Noritaka Ajari
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
1 shared publication - Yoshinori Hayashi
Osaka University, Suita, Osaka Japan
1 shared publication
Latest Publications
- Open Access
- 7 June 2013
- Published by Springer Nature in Discover Nano
- Vol. 8 (1) , 275
Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry
Absolute flatness of three silicon plane mirrors have been measured by a three-intersection method based on the three-flat method using a near-infrared interferometer. The interferometer was constructed using a near-infrared laser diode with a 1,310-nm wavelength light where the silicon plane mirror is transparent. The height differences at the coordinate values between the absolute line profiles by the three-intersection method have been evaluated. The height differences of the three flats were 4.5 nm or less. The three-intersection method using the near-infrared interferometer was useful for measuring the absolute flatness of the silicon plane mirrors.
- 7 June 2013
- Published by Springer Nature in Discover Nano
- Vol. 8 (1) , 275
Open AccessAbsolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry
Absolute flatness of three silicon plane mirrors have been measured by a three-intersection method based on the three-flat method using a near-infrared interferometer. The interferometer was constructed using a near-infrared laser diode with a 1,310-nm wavelength light where the silicon plane mirror is transparent. The height differences at the coordinate values between the absolute line profiles by the three-intersection method have been evaluated. The height differences of the three flats were 4.5 nm or less. The three-intersection method using the near-infrared interferometer was useful for measuring the absolute flatness of the silicon plane mirrors.