Bruce D. Terris

Spin-transfer torque (STT) magnetic random access memory (MRAM) is gaining commercial traction in low-density embedded and standalone memories, but the available market opportunities would grow exponentially if STT-MRAM could approach dynamic random access memory (DRAM) bit density. Of course, achieving DRAM density will require, among other things, demonstrating the ability to pattern MRAM bits at an extremely tight pitch. Here, an experimental demonstration of fabrication and electrical testing of a STT-MRAM bit array are reported. By optimizing the hard mask and ion beam etching (IBE) processes, MRAM bit arrays with a full pitch down to 50 nm are fabricated, in which the bits are individually tested using a novel bottom-point-contact method.

We present a method for growing bit patterned magnetic recording media using directed growth of sputtered granular perpendicular magnetic recording media. The grain nucleation is templated using an epitaxial seed layer which contains Pt pillars separated by amorphous metal oxide. The scheme enables the creation of both templated data and servo regions suitable for high density hard disk drive operation. We illustrate the importance of using a process that is both topographically and chemically driven to achieve high quality media.

We analyze the magnetic cluster size (MCS) and magnetic cluster size distribution (MCSD) in a variety of perpendicular magnetic recording (PMR) media designs using resonant small angle x-ray scattering at the Co L₃ absorption edge. The different PMR media flavors considered here vary in grain size between 7.5 and 9.5 nm as well as in lateral inter-granular exchange strength, which is controlled via the segregant amount. While for high inter-granular exchange, the MCS increases rapidly for grain sizes below 8.5 nm, we show that for increased amount of segregant with less exchange the MCS remains relatively small, even for grain sizes of 7.5 and 8 nm. However, the MCSD still increases sharply when shrinking grains from 8 to 7.5 nm. We show evidence that recording performance such as signal-to-noise-ratio on the spin stand correlates well with the product of magnetic cluster size and magnetic cluster size distribution.

We systematically vary the strength of the vertical interlayer exchange coupling (VIEC) between the magnetic layers (MLs) of an advanced exchange coupled composite media and experimentally investigate, through magnetic viscosity and dynamic coercivity measurements, the impact on the thermal stability. The strength of the VIEC is controlled through exchange coupling layers of varied thicknesses, whereas MLs are unchanged. We estimate the thermal energy barrier ΔE_o as a function of the VIEC within the standard Arrhenius-Neel relaxation and Sharrock formalisms and characterize the effect of the VIEC on the degree of incoherency in the grain reversal mechanism. The analysis shows that while ΔE_o drops for weaker VIEC, the ratio of ΔE_o to M_sH_o energy per activation volume is maintained near 2 and weakly optimizes for intermediate VIEC.

We analyze the magnetic design for different generations of perpendicular magnetic recording (PMR) media using resonant soft x-ray small angle x-ray scattering. This technique allows us to simultaneously extract in a single experiment the key structural and magnetic parameters, i.e., lateral structural grain and magnetic cluster sizes as well as their distributions. We find that earlier PMR media generations relied on an initial reduction in the magnetic cluster size down to the grain level of the high anisotropy granular base layer, while very recent media designs introduce more exchange decoupling also within the softer laterally continuous cap layer. We highlight that this recent development allows optimizing magnetic cluster size and magnetic cluster size distribution within the composite media system for maximum achievable area density, while keeping the structural grain size roughly constant.

By analyzing the magnetic cluster size of various media, we have investigated the variation of inter-granular exchange coupling with grain size. With the reduction of the grain size below 8.0 nm, higher inter-granular exchange coupled media showed a large increase in magnetic cluster size, while lower exchange media did not show as dramatic a cluster size change. This cluster size “knee” position was consistent with reduction in signal-to-noise ratio. To utilize small grain media for high density recording, it is desirable to push this “knee” position toward smaller grain size.

The writing quality of magnetic recording improves with increasing sharpness of the written transitions. Ultimately, the transition sharpness is limited by the grains themselves, and no longer depends on the head field gradient. In this study, we varied the head field gradient by changing the head-media spacing and characterized the write quality by transition jitter and equalized signal-to-noise (eSNR) measurements. Consistent with a recording in the grain size limit, we discovered that the write quality did not improve with smaller head to medium spacings. We also found that the measured values for the jitter and the eSNR are close to what is estimated for grain size limited recording.