Hexagonal Array Piezoelectric MEMS Acoustic Sensor With High Sensitivity and Omnidirectionality

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Abstract
To enhance low-frequency detection sensitivity and achieve omnidirectionality in underwater acoustic sensors, this paper reports a hexagonal array piezoelectric MEMS acoustic sensor (HAAS). The HAAS comprises six identical triangular cantilever beams symmetrically arranged in a regular hexagon. This array configuration enables signal superposition to boost sensitivity, while the multi-degree-of-freedom vibrating membrane promotes omnidirectionality in underwater acoustic detection. The distinctive hexagonal array structure imparts exceptionally high sensitivity in the frequency range of 630Hz to 1.6kHz (−161.2 dB at fixed 1.6kHz,ref.1 V/ $\upmu $ Pa) and superior omnidirectional directivity, with nonuniformities of ±0.5 dB in the horizontal plane and ±0.3 dB in the vertical plane at 2 kHz. Experimental results demonstrate the substantial potential of the HAAS for applications in underwater biological activity monitoring, communication, and resource exploration.[2025-0191]
Funding Information
  • Shanghai Collaborative Innovation Project (XTCX-KJPT-2024-03)
  • National Natural Science Foundation of China (42127807-03)
  • Fundamental Research Funds for the Central Universities
  • Shanghai Leading Talent Program of Eastern Talent Plan
  • Oceanic Interdisciplinary Program of Shanghai Jiao Tong University (SL2023ZD205)

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