RBS, ERDA and NR analyses of hard amorphous nitrogen-incorporated carbon films
Authors:
- F.L. FreireFFF.L. Freire
- D.F. FranceschiniDFD.F. Franceschini
- 1 March 1994
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 85 (1-4) , 268-271
Abstract
No abstract availableKeywords
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