Ultra-High Density Deep Trench Capacitor (DTC) for 3DIC Integration
Authors:
- 25 September 2024
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 1-3
Abstract
Ultra-high-density IPD capacitor is increasingly essential for high performance computing (HPC), artificial intelligence (AI) systems and mobile application compact systems in 3DFabric platform. Utilizing advanced etching and deposition techniques, Deep Trench Capacitor (DTC) features deep and narrow trenches filled with high-K dielectrics and conductive electrodes. DTC can provide significantly increased capacitance density with low equivalent series resistance (ESR) and equivalent series inductance (ESL). The miniaturization of capacitors will continue to advance Moore's law for SOC.Keywords
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