Hydrogen and deuterium termination of diamond for low surface resistance and surface step control
Authors:
- M.W. GeisMGM.W. Geis
- J.O. VargheseJVJ.O. Varghese
- Alon VardiAVAlon Vardi
- J. KedzierskiJKJ. Kedzierski
- J. DaultonJDJ. Daulton
- D. CalawaDCD. Calawa
- M.A. HollisMHM.A. Hollis
- C.H. WuorioCWC.H. Wuorio
- G.W. TurnerGTG.W. Turner
- S.M. WarnockSWS.M. Warnock
- T. OsadchyTOT. Osadchy
- J. MallekJMJ. Mallek
- 1 October 2021
- journal article
- research article
- Published by Elsevier in Diamond and Related Materials
- Vol. 118
Abstract
No abstract availableKeywords
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