Experimental study of a variable-capacitance micromotor with electrostatic suspension
Authors:
- F T HanFHF T Han
- Q P WuQWQ P Wu
- L WangLWL Wang
- 25 October 2010
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 20 (11)
Abstract
No abstract availableKeywords
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