Direct bonding of ALD Al 2 O 3 to silicon nitride thin films
- 1 May 2017
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 176, 71-74
Abstract
No abstract availableKeywords
Funding Information
- DTU Chemistry
- DTU CEN
- DTU Nanotech (12-126194)
- Danish Research Council for Technology and Production (12-126194)
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