DMPFIT: A Tool for Atomic-Scale Metrology via Nonlinear Least-Squares Fitting of Peaks in Atomic-Resolution TEM Images
Author:
Open Access
- 24 May 2022
- journal article
- research article
- Published by Springer Nature in Nanomanufacturing and Metrology
- Vol. 5 (2) , 101-111
Abstract
Despite the wide availability and usage of Gatan’s DigitalMicrograph software in the electron microscopy community for image recording and analysis, nonlinear least-squares fitting in DigitalMicrograph is less straightforward. This work presents a ready-to-use tool, the DMPFIT software package, written in DigitalMicrograph script and C++ language, for nonlinear least-squares fitting of the intensity distribution of atomic columns in atomic-resolution transmission electron microscopy (TEM) images with a general two-dimensional (2D) Gaussian model. Applications of the DMPFIT software are demonstrated both in atomic-resolution conventional coherent TEM (CTEM) images recorded by the negative spherical aberration imaging technique and in high angle annular dark field (HAADF) scanning TEM (STEM) images. The implemented peak-finding algorithm based on the periodicity of 2D lattices enables reliable and convenient atomic-scale metrology as well as intuitive presentation of the resolved atomic structures.Keywords
Funding Information
- Deutsche Forschungsgemeinschaft (SFB917)
- Forschungszentrum Jülich GmbH
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