An ultra-high low-frequency SPL piezoelectric MEMS loudspeaker based on sputtered PZT
Authors:
- Qincheng ZhengQZQincheng Zheng
- Ke CaoKCKe Cao
- Chenyu BaiCBChenyu Bai
- Xudong MaXMXudong Ma
- Ning DengNDNing Deng
- Yulang ChengYCYulang Cheng
- Yao LuYLYao Lu
- Huikai XieHuikai Xie
- 6 April 2025
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 389
Abstract
No abstract availableFunding Information
- National Natural Science Foundation of China (62350710218)
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