Modular Synthesis of Phthalaldehyde Derivatives Enabling Access to Photoacid Generator-Bound Self-Immolative Polymer Resists with Next-Generation Photolithographic Properties
- 8 October 2022
- journal article
- research article
- Published by American Chemical Society (ACS) in Journal of the American Chemical Society
- Vol. 144 (42) , 19508-19520
Abstract
No abstract availableFunding Information
- Intel Corporation (2885.001)
- Cornell University
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