Effects of argon and oxygen addition to the CH4-H2 feed gas on diamond synthesis by microwave plasma enhanced chemical vapor deposition
Authors:
- Young-Soo HanYHYoung-Soo Han
- Yoon-Kee KimYKYoon-Kee Kim
- Jai-Young LeeJLJai-Young Lee
- 1 November 1997
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 310 (1-2) , 39-46
Abstract
No abstract availableKeywords
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