Metal‐assisted SIMS for three‐dimensional analysis using shave‐off section processing

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Abstract
Three‐dimensional microanalysis of the microstructure of organic materials is important in the development and progress of analytical methods on the micro‐to‐nanometer scales. We have developed a novel three‐dimensional microanalysis method using focused ion beams for section processing (shave‐off scanning) and time‐of‐flight secondary ion mass spectrometry for mapping. Shave‐off scanning can effectively create an arbitrary section on a sample set against composites materials with a wide variety of shapes; three‐dimensional sample images are then obtained by alternately operating two focused ion beams. In this study, we adapted metal‐assisted secondary ion mass spectrometry for three‐dimensional microanalysis. We have devised a unique method whereby gold is deposited on a section to be analyzed after every shave‐off sectioning by setting a gold plate at the back of the sample. Consequently, gold was observed to be deposited on the created cross‐section concurrently with shave‐off sectioning, resulting in a substantially enhanced secondary ion intensity. Copyright © 2014 John Wiley & Sons, Ltd.

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