A nested cantilever piezoelectric MEMS speaker

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Abstract
To enhance the sound pressure level (SPL) and reduce the total harmonic distortion (THD) of piezoelectric micro-electro-mechanical system (MEMS) speakers, a nested cantilever piezoelectric MEMS speaker is proposed. It primarily consists of a PZT functional layer and a mica supporting layer. Measurements of the packaged device demonstrate that, compared with many reported piezoelectric MEMS speakers, the proposed nested cantilever piezoelectric MEMS speaker exhibits higher SPL in the mid-frequency range and lower THD within a continuous wider frequency range. When the driving voltage is 1 V rms , the SPL exceeds 89 dB in the frequency range of 4.3 kHz–14.1 kHz, demonstrating its potential in improving the SPL. The THD of the device remains below 1.4% within 160 Hz–20 kHz frequency range, demonstrating it features a wide applicable frequency range. The proposed piezoelectric MEMS speaker shows excellent resistance to fracture and fatigue by dropping from 5 m and playing music for 5 h. This study provides new insights into further improving SPL and reducing THD in piezoelectric MEMS speakers.
Funding Information
  • Tianjin Municipal Enterprise Science and Technology Commissioner Project (25YDTPJC00540)
  • National Natural Science Foundation of China (52302339)
  • Beijing-Tianjin-Hebei Natural Science Foundation Cooperation Project (25JJJC0011)
  • Natural Science Foundation of Tianjin Municipality (24JCYBJC00790)

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