Compact folded-waveguide resonators
- 19 October 2004
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- 3D silicon micromachined RF resonators2003
- Toward a novel planar circuit compatible silicon micromachined waveguide2003
- A reduced-size silicon micromachined high-Q resonator at 5.7 GHzIEEE Transactions on Microwave Theory and Techniques, 2002
- High-Q bulk micromachined silicon cavity resonatorat Ka-bandElectronics Letters, 2001
- A micromachined high-Q X-band resonatorIEEE Microwave and Guided Wave Letters, 1997