A novel green CeO2 polishing slurry and its chemical mechanical action mechanism for achieving atomic-level smoothing of fused silica glass surfaces
Authors:
- Fukun LiFLFukun Li
- Yang BaiYBYang Bai
- HaiXiang HuHHHaiXiang Hu
- Guanbo QiaoGQGuanbo Qiao
- Lingzhong LiLLLingzhong Li
- Feng ZhangFZFeng Zhang
- Xuejun ZhangXZXuejun Zhang
- 3 December 2024
- journal article
- research article
- Published by Elsevier in Colloids and Surfaces A: Physicochemical and Engineering Aspects
- Vol. 707
Abstract
No abstract availableKeywords
Funding Information
- National Key Research and Development Program of China (2022YFB3403405)
- Natural Science Foundation of Jilin Province (SKL202302021)
- National Natural Science Foundation of China (12203048)
This publication has 35 references indexed in Scilit:
- Angstrom surface on copper induced by novel green chemical mechanical polishing using ceria and silica composite abrasivesApplied Surface Science, 2023
- Development and characterization of a novel RE3+ doped Core-shell CeO2 abrasive system and its glass CMP investigationsApplied Surface Science, 2023
- Effects of slurry pH on chemical and mechanical actions during chemical mechanical polishing of YAGApplied Surface Science, 2021
- Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaningApplied Surface Science, 2021
- Study on the effect of ceria concentration on the silicon oxide removal rate in chemical mechanical planarizationColloids and Surfaces A: Physicochemical and Engineering Aspects, 2021
- Photoelectrochemical Synthesis of Ammonia on the Aerophilic-Hydrophilic Heterostructure with 37.8% EfficiencyChem, 2019
- Application of surface analysis in study on removal mechanism and abrasive selection during fused silica chemical mechanical polishingSurface and Interface Analysis, 2019
- Advanced analysis of copper X‐ray photoelectron spectraSurface and Interface Analysis, 2017
- Negative bias illumination stress stability of dual‐active layer amorphous indium‐gallium‐zinc‐oxide thin‐film transistorPhysica Status Solidi (a), 2016
- Structure–property correlation in cellular silica processed through hydrophobized fused silica powder for aerospace applicationJournal of Alloys and Compounds, 2010